Self-interstitial Clusters in Silicon

On the simulation of the formation and dissolution of silicon self-interstitial clusters and the corresponding inverse modeling problem

The formation and dissolution of silicon self-interstitial clusters is linked to the phenomenon of transient-enhanced diffusion (TED) which in turn has gained importance in the manufacturing of semiconductor devices. Based on theoretical considerations and measurements of the number of self-interstitial clusters during a thermal step, a model for the formation and dissolution of self-interstiti...

A Calibrated Model for Silicon Self-Interstitial Cluster Formation and Dissolution

The formation and dissolution of Silicon selfinterstitial clusters is linked to the phenomenon of TED (transient enhanced diffusion) which in turn has gained importance in the manufacturing of semiconductor devices. Based on theoretical considerations and measurements of the number of self-interstitial clusters during a thermal step we were interested in finding a suitable model for the formati...

Boron Diffusion and Silicon Self-Interstitial Recycling between SiGeC layers

Substitutional carbon is known to locally reduce silicon self-interstitial concentrations and act as a barrier to self-interstitial migration through the carbon rich regions. A silicon spacer between two carbon rich SiGe layers is fabricated in this work to examine self-interstitial generation in a region that is isolated from self-interstitial formation at the surface or in the silicon bulk. B...

Structures and stabilities of small carbon interstitial clusters in cubic silicon carbide

From compact point defects to extended structures in silicon

First-principles studies of the formation and dynamics of silicon interstitial-clusters suggest a possible growth mechanism of silicon interstitial-chains as seen in macroscopic {311} planar defects. The relative populations of the three lowest-energy silicon tri-interstitials equilibrate within a few microseconds. Unfortunately, the tri-interstitial chain is unstable, quickly decaying to the g...